Modeling the Electrostatic Deflection of a MEMS Multilayers Based Actuator
نویسندگان
چکیده
منابع مشابه
Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator
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ژورنال
عنوان ژورنال: Mathematical Problems in Engineering
سال: 2013
ISSN: 1024-123X,1563-5147
DOI: 10.1155/2013/959232